Improved 4H-SiC UMOSFET with super-junction shield region
Pei Shen(沈培), Ying Wang(王颖), Xing-Ji Li(李兴冀), Jian-Qun Yang(杨剑群), Cheng-Hao Yu(于成浩), and Fei Cao(曹菲)
Improved 4H-SiC UMOSFET with super-junction shield region
Pei Shen(沈培), Ying Wang(王颖), Xing-Ji Li(李兴冀), Jian-Qun Yang(杨剑群), Cheng-Hao Yu(于成浩), and Fei Cao(曹菲)
中国物理B
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2021, (5): 58502
-058502
.
DOI: 10.1088/1674-1056/abd740