Preparation of AlN film grown on sputter-deposited and annealed AlN buffer layer via HVPE
Di-Di Li(李迪迪), Jing-Jing Chen(陈晶晶), Xu-Jun Su(苏旭军), Jun Huang(黄俊), Mu-Tong Niu(牛牧童), Jin-Tong Xu(许金通), and Ke Xu(徐科)
中国物理B . 2021, (3): 36801 .  DOI: 10.1088/1674-1056/abd392