Measurement of electronegativity during the E to H mode transition in a radio frequency inductively coupled Ar/O 2 plasma
Peng-Cheng Du(杜鹏程), Fei Gao(高飞, Xiao-Kun Wang(王晓坤), Yong-Xin Liu(刘永新), and You-Nian Wang(王友年)
中国物理B . 2021, (3): 35202 .  DOI: 10.1088/1674-1056/abccb0