Mechanism of titanium-nitride chemical mechanical polishing
Dao-Huan Feng(冯道欢), Ruo-Bing Wang(王若冰), Ao-Xue Xu(徐傲雪), Fan Xu(徐帆), Wei-Lei Wang(汪为磊), Wei-Li Liu(刘卫丽), and Zhi-Tang Song(宋志棠)
中国物理B . 2021, (2): 28301 -0 .  DOI: 10.1088/1674-1056/abc161