Effect of source temperature on phase and metal–insulator transition temperature of vanadium oxide films grown by atomic layer deposition
Bingheng Meng(孟兵恒), Dengkui Wang(王登魁), Deshuang Guo(郭德双), Juncheng Liu(刘俊成), Xuan Fang(方铉), Jilong Tang(唐吉龙), Fengyuan Lin(林逢源), Xinwei Wang(王新伟), Dan Fang(房丹), Zhipeng Wei(魏志鹏)
中国物理B
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2020, (10): 107102
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DOI: 10.1088/1674-1056/abaee7