Effect of annealing temperature on interfacial and electrical performance of Au-Pt-Ti/HfAlO/InAlAs metal-oxide-semiconductor capacitor
关赫, 姜成语, 王少熙
Effect of annealing temperature on interfacial and electrical performance of Au-Pt-Ti/HfAlO/InAlAs metal-oxide-semiconductor capacitor
He Guan(关赫), Cheng-Yu Jiang(姜成语), Shao-Xi Wang(王少熙)
中国物理B . 2020, (9): 96701 -096701 .  DOI: 10.1088/1674-1056/ab8a34