Effect of radio frequency bias on plasma characteristics of inductively coupled argon discharge based on fluid simulations
孙晓艳, 张钰如, 柴森, 王友年, 楚艳艳, 何建新
Effect of radio frequency bias on plasma characteristics of inductively coupled argon discharge based on fluid simulations
Xiao-Yan Sun(孙晓艳), Yu-Ru Zhang(张钰如), Sen Chai(柴森), You-Nian Wang(王友年), Yan-Yan Chu(楚艳艳), Jian-Xin He(何建新)
中国物理B
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2020, (9): 95203
-095203
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DOI: 10.1088/1674-1056/ab9436