Stress and strain analysis of Si-based Ⅲ-V template fabricated by ion-slicing
赵舒燕, 宋禹忻, 梁好, 金婷婷, 林家杰, 岳丽, 游天桂, 王长, 欧欣, 王庶民
Stress and strain analysis of Si-based Ⅲ-V template fabricated by ion-slicing
Shuyan Zhao(赵舒燕), Yuxin Song(宋禹忻), Hao Liang(梁好), Tingting Jin(金婷婷), Jiajie Lin(林家杰), Li Yue(岳丽), Tiangui You(游天桂), Chang Wang(王长), Xin Ou(欧欣), Shumin Wang(王庶民)
中国物理B
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2020, (7): 77303
-077303
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DOI: 10.1088/1674-1056/ab8a35