Microstructure evolution and passivation quality of hydrogenated amorphous silicon oxide (a-SiO <sub><i>x</i></sub>:H) on <100>- and <111>-orientated c-Si wafers

Microstructure evolution and passivation quality of hydrogenated amorphous silicon oxide (a-SiO _x:H) on <100>- and <111>-orientated c-Si wafers

陈俊帆, 赵生盛, 延玲玲, 任慧志, 韩灿, 张德坤, 魏长春, 王广才, 侯国付, 赵颖, 张晓丹

Microstructure evolution and passivation quality of hydrogenated amorphous silicon oxide (a-SiO _x:H) on <100>- and <111>-orientated c-Si wafers

Jun-Fan Chen(陈俊帆), Sheng-Sheng Zhao(赵生盛), Ling-Ling Yan(延玲玲), Hui-Zhi Ren(任慧志), Can Han(韩灿), De-Kun Zhang(张德坤), Chang-Chun Wei(魏长春), Guang-Cai Wang(王广才), Guo-Fu Hou(侯国付), Ying Zhao(赵颖), Xiao-Dan Zhang(张晓丹)

中国物理B . 2020, (3): 38801 -038801 . DOI: 10.1088/1674-1056/ab6c47