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High-throughput fabrication and semi-automated characterization of oxide thin film transistors
韩炎兵, Sage Bauers, 张群, Andriy Zakutayev
High-throughput fabrication and semi-automated characterization of oxide thin film transistors
Yanbing Han(韩炎兵), Sage Bauers, Qun Zhang(张群), Andriy Zakutayev
中国物理B . 2020, (
1
): 18502 -018502 . DOI: 10.1088/1674-1056/ab5d05