Study on the nitridation of
β-Ga
2O
3 films
程菲, 李悦文, 赵红, 修向前, 贾志泰, 刘铎, 华雪梅, 谢自力, 陶涛, 陈鹏, 刘斌, 张荣, 郑有炓
Study on the nitridation of
β-Ga
2O
3 films
Fei Cheng(程菲), Yue-Wen Li(李悦文), Hong Zhao(赵红), Xiang-Qian Xiu(修向前), Zhi-Tai Jia(贾志泰), Duo Liu(刘铎), Xue-Mei Hua(华雪梅), Zi-Li Xie(谢自力), Tao Tao(陶涛), Peng Chen(陈鹏), Bin Liu(刘斌), Rong Zhang(张荣), You-Dou Zheng(郑有炓)
中国物理B
.
2019, (8): 88103
-088103
.
DOI: 10.1088/1674-1056/28/8/088103