Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition

卢肖勇, 柴俊杰

Xiaoyong Lu(卢肖勇), Junjie Chai(柴俊杰)

中国物理B . 2019, (7): 74702 -074702 . DOI: 10.1088/1674-1056/28/7/074702