Fabrication and characterization of one-port surface acoustic wave resonators on semi-insulating GaN substrates

吉雪, 董文秀, 张育民, 王建峰, 徐科

Xue Ji(吉雪), Wen-Xiu Dong(董文秀), Yu-Min Zhang(张育民), Jian-Feng Wang(王建峰), Ke Xu(徐科)

中国物理B . 2019, (6): 67701 -067701 . DOI: 10.1088/1674-1056/28/6/067701