Formation and preferred growth behavior of grooved seed silicon substrate for kerfless technology
鄢靖源, 王勇炜, 郭勇明, 张伟, 王聪, 安保礼, 刘东方
Formation and preferred growth behavior of grooved seed silicon substrate for kerfless technology
Jing-Yuan Yan(鄢靖源), Yong-Wei Wang(王勇炜), Yong-Ming Guo(郭勇明), Wei Zhang(张伟), Cong Wang(王聪), Bao-Li An(安保礼), Dong-Fang Liu(刘东方)
中国物理B
.
2019, (6): 66802
-066802
.
DOI: 10.1088/1674-1056/28/6/066802