Mechanism of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures via laser annealing

侯明辰, 谢刚, 盛况

Mingchen Hou(侯明辰), Gang Xie(谢刚), Kuang Sheng(盛况)

中国物理B . 2019, (3): 37302 -037302 . DOI: 10.1088/1674-1056/28/3/037302