PEALD-deposited crystalline GaN films on Si (100) substrates with sharp interfaces
刘三姐, 何荧峰, 卫会云, 仇鹏, 宋祎萌, 安运来, 阿布度, 拉赫曼, 彭铭曾, 郑新和
PEALD-deposited crystalline GaN films on Si (100) substrates with sharp interfaces
San-Jie Liu(刘三姐), Ying-Feng He(何荧峰), Hui-Yun Wei(卫会云), Peng Qiu(仇鹏), Yi-Meng Song(宋祎萌), Yun-Lai An(安运来), Abdul Rehman(阿布度-拉赫曼), Ming-Zeng Peng(彭铭曾), Xin-He Zheng(郑新和)
中国物理B
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2019, (2): 26801
-026801
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DOI: 10.1088/1674-1056/28/2/026801