Key technologies for dual high- k and dual metal gate integration
李永亮, 徐秋霞, 王文武
Key technologies for dual high- k and dual metal gate integration
Yong-Liang Li(李永亮), Qiu-Xia Xu(徐秋霞), Wen-Wu Wang(王文武)
中国物理B . 2018, (9): 97306 -097306 .  DOI: 10.1088/1674-1056/27/9/097306