Structural and electrical properties of reactive magnetron sputtered yttrium-doped HfO
2 films
张昱, 徐军, 周大雨, 王行行, 陆文琪, Chi-Kyu Choi
Structural and electrical properties of reactive magnetron sputtered yttrium-doped HfO
2 films
Yu Zhang(张昱), Jun Xu(徐军), Da-Yu Zhou(周大雨), Hang-Hang Wang(王行行), Wen-Qi Lu(陆文琪), Chi-Kyu Choi
中国物理B
.
2018, (4): 48103
-048103
.
DOI: 10.1088/1674-1056/27/4/048103