Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas
薛婵, 高飞, 刘永新, 刘佳, 王友年
Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas
Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), Jia Liu(刘佳), You-Nian Wang(王友年)
中国物理B . 2018, (4): 45202 -045202 .  DOI: 10.1088/1674-1056/27/4/045202