Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction
苗渊浩, 胡辉勇, 李鑫, 宋建军, 宣荣喜, 张鹤鸣
Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction
Yuan-Hao Miao(苗渊浩), Hui-Yong Hu(胡辉勇), Xin Li(李鑫), Jian-Jun Song(宋建军), Rong-Xi Xuan(宣荣喜), He-Ming Zhang(张鹤鸣)
中国物理B
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2017, (12): 127309
-127309
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DOI: 10.1088/1674-1056/26/12/127309