Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
刘悦, 赵璐璐, 周艳文
Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
Tagra Samir, Yue Liu(刘悦), Lu-Lu Zhao(赵璐璐), Yan-Wen Zhou(周艳文)
中国物理B . 2017, (11): 115201 -115201 .  DOI: 10.1088/1674-1056/26/11/115201