Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering
张悦, 叶超, 王响英, 杨培芳, 郭佳敏, 张苏
Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering
Yue Zhang(张悦), Chao Ye(叶超), Xiang-Ying Wang(王响英), Pei-Fang Yang(杨培芳), Jia-Min Guo(郭佳敏), Su Zhang(张苏)
中国物理B
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2017, (9): 95206
-095206
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DOI: 10.1088/1674-1056/26/9/095206