Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics
毕振华, 洪义, 雷光玖, 王帅, 王友年, 刘东平
Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics
Zhen-Hua Bi(毕振华), Yi Hong(洪义), Guang-Jiu Lei(雷光玖), Shuai Wang(王帅), You-Nian Wang(王友年), Dong-Ping Liu(刘东平)
中国物理B
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2017, (7): 75203
-075203
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DOI: 10.1088/1674-1056/26/7/075203