Analytical capacitance model for 14 nm FinFET considering dual-
k spacer
郑芳林, 刘程晟, 任佳琪, 石艳玲, 孙亚宾, 李小进
Analytical capacitance model for 14 nm FinFET considering dual-
k spacer
Fang-Lin Zheng(郑芳林), Cheng-Sheng Liu(刘程晟), Jia-Qi Ren(任佳琪), Yan-Ling Shi(石艳玲), Ya-Bin Sun(孙亚宾), Xiao-Jin Li(李小进)
中国物理B
.
2017, (7): 77303
-077303
.
DOI: 10.1088/1674-1056/26/7/077303