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Effect of driving frequency on the structure of silicon grown on Ag (111) films by very-high-frequency magnetron sputtering
郭佳敏, 叶超, 王响英, 杨培芳, 张苏
Effect of driving frequency on the structure of silicon grown on Ag (111) films by very-high-frequency magnetron sputtering
Jia-Min Guo(郭佳敏), Chao Ye(叶超), Xiang-Ying Wang(王响英), Pei-FangYang(杨培芳), Su Zhang(张苏)
中国物理B . 2017, (
6
): 65207 -065207 . DOI: 10.1088/1674-1056/26/6/065207