High quality factor superconducting coplanar waveguide fabricated with TiN

刘强, 薛光明, 谭新生, 于海峰, 于扬

Qiang Liu(刘强), Guang-Ming Xue(薛光明), Xin-Sheng Tan(谭新生), Hai-Feng Yu(于海峰), Yang Yu(于扬)

中国物理B . 2017, (5): 58402 -058402 . DOI: 10.1088/1674-1056/26/5/058402