Etching mask optimization of InAs/GaSb superlattice mid-wavelength infared 640×512 focal plane array

郝宏玥, 向伟, 王国伟, 徐应强, 韩玺, 孙瑶耀, 蒋洞微, 张宇, 廖永平, 魏思航, 牛智川

Hong-Yue Hao(郝宏玥), Wei Xiang(向伟), Guo-Wei Wang(王国伟), Ying-Qiang Xu(徐应强), Xi Han(韩玺), Yao-Yao Sun(孙瑶耀), Dong-Wei Jiang(蒋洞微), Yu Zhang(张宇), Yong-Ping Liao(廖永平), Si-Hang Wei(魏思航), Zhi-Chuan Niu(牛智川)

中国物理B . 2017, (4): 47303 -047303 . DOI: 10.1088/1674-1056/26/4/047303