Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiO
x/Si system
高明, 杜汇伟, 杨洁, 赵磊, 徐静, 马忠权
Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiO
x/Si system
Ming Gao(高明), Hui-Wei Du(杜汇伟), Jie Yang(杨洁), Lei Zhao(赵磊), Jing Xu(徐静), Zhong-Quan Ma(马忠权)
中国物理B
.
2017, (4): 45201
-045201
.
DOI: 10.1088/1674-1056/26/4/045201