Low power fluorine plasma effects on electrical reliability of AlGaN/GaN high electron mobility transistor
杨凌, 周小伟, 马晓华, 吕玲, 曹艳荣, 张进成, 郝跃
Low power fluorine plasma effects on electrical reliability of AlGaN/GaN high electron mobility transistor
Ling Yang(杨凌), Xiao-Wei Zhou(周小伟), Xiao-Hua Ma(马晓华), Ling Lv(吕玲), Yan-Rong Cao(曹艳荣), Jin-Cheng Zhang(张进成), Yue Hao(郝跃)
中国物理B
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2017, (1): 17304
-017304
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DOI: 10.1088/1674-1056/26/1/017304