Fluid simulation of the pulsed bias effect on inductively coupled nitrogen discharges for low-voltage plasma immersion ion implantation
孙晓艳, 张钰如, 李雪春, 王友年
Fluid simulation of the pulsed bias effect on inductively coupled nitrogen discharges for low-voltage plasma immersion ion implantation
Xiao-Yan Sun(孙晓艳), Yu-Ru Zhang(张钰如), Xue-Chun Li(李雪春), You-Nian Wang(王友年)
中国物理B . 2017, (1): 15201 -015201 .  DOI: 10.1088/1674-1056/26/1/015201