Parasitic effects of air-gap through-silicon vias in high-speed three-dimensional integrated circuits

刘晓贤, 朱樟明, 杨银堂, 丁瑞雪, 李跃进

Xiaoxian Liu(刘晓贤), Zhangming Zhu(朱樟明), Yintang Yang(杨银堂), Ruixue Ding(丁瑞雪), Yuejin Li(李跃进)

中国物理B . 2016, (11): 118401 -118401 . DOI: 10.1088/1674-1056/25/11/118401