Effects of fluorine-based plasma treatment and thermal annealing on high-Al content AlGaN Schottky contact
刘芳, 秦志新
Effects of fluorine-based plasma treatment and thermal annealing on high-Al content AlGaN Schottky contact
Fang Liu(刘芳), Zhixin Qin(秦志新)
中国物理B . 2016, (11): 117304 -117304 .  DOI: 10.1088/1674-1056/25/11/117304