Self-aligned-gate AlGaN/GaN heterostructure field-effect transistor with titanium nitride gate
张家琦, 王磊, 李柳暗, 王青鹏, 江滢, 朱慧超, 敖金平
Self-aligned-gate AlGaN/GaN heterostructure field-effect transistor with titanium nitride gate
Jia-Qi Zhang(张家琦), Lei Wang(王磊), Liu-An Li(李柳暗), Qing-Peng Wang(王青鹏), Ying Jiang(江滢), Hui-Chao Zhu(朱慧超), Jin-Ping Ao(敖金平)
中国物理B
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2016, (8): 87308
-087308
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DOI: 10.1088/1674-1056/25/8/087308