Preparation and structural properties of thin carbon films by very-high-frequency magnetron sputtering
高明伟, 叶超, 王响英, 何一松, 郭佳敏, 杨培芳
Preparation and structural properties of thin carbon films by very-high-frequency magnetron sputtering
Ming-Wei Gao(高明伟), Chao Ye(叶超), Xiang-Ying Wang(王响英), Yi-Song He(何一松), Jia-Min Guo(郭佳敏), Pei-Fang Yang(杨培芳)
中国物理B
.
2016, (7): 75202
-075202
.
DOI: 10.1088/1674-1056/25/7/075202