Influences of different structures on the characteristics of H
2O-based and O
3-based La
xAl
yO films deposited by atomic layer deposition
费晨曦, 刘红侠, 汪星, 赵冬冬, 王树龙, 陈树鹏
Influences of different structures on the characteristics of H
2O-based and O
3-based La
xAl
yO films deposited by atomic layer deposition
Chen-Xi Fei(费晨曦), Hong-Xia Liu(刘红侠), Xing Wang(汪星), Dong-Dong Zhao(赵冬冬), Shu-Long Wang(王树龙), Shu-Peng Chen(陈树鹏)
中国物理B
.
2016, (5): 58106
-058106
.
DOI: 10.1088/1674-1056/25/5/058106