Fabrication and characterization of the normally-off N-channel lateral 4H-SiC metal-oxide-semiconductor field-effect transistors
宋庆文, 汤晓燕, 何艳静, 唐冠男, 王悦湖, 张艺蒙, 郭辉, 贾仁需, 吕红亮, 张义门, 张玉明
Fabrication and characterization of the normally-off N-channel lateral 4H-SiC metal-oxide-semiconductor field-effect transistors
Qing-Wen Song(宋庆文), Xiao-Yan Tang(汤晓燕), Yan-Jing He(何艳静), Guan-Nan Tang(唐冠男),Yue-Hu Wang(王悦湖), Yi-Meng Zhang(张艺蒙), Hui Guo(郭辉), Ren-Xu Jia(贾仁需),Hong-Liang Lv(吕红亮), Yi-Men Zhang(张义门), Yu-Ming Zhang(张玉明)
中国物理B
.
2016, (3): 37306
-037306
.
DOI: 10.1088/1674-1056/25/3/037306