Detection and formation mechanism of micro-defects in ultrafine pitch Cu

刘子玉, 蔡坚, 王谦, 陈瑜

Detection and formation mechanism of micro-defects in ultrafine pitch Cu–Cu direct bonding

Zi-Yu Liu(刘子玉), Jian Cai(蔡坚), Qian Wang(王谦), Yu Chen(陈瑜)

中国物理B . 2016, (1): 18103 -018103 . DOI: 10.1088/1674-1056/25/1/018103