Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface
韩超, 张玉明, 宋庆文, 汤晓燕, 张义门, 郭辉, 王悦湖
Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface
Han Chao (韩超), Zhang Yu-Ming (张玉明), Song Qing-Wen (宋庆文), Tang Xiao-Yan (汤晓燕), Zhang Yi-Men (张义门), Guo Hui (郭辉), Wang Yue-Hu (王悦湖)
中国物理B
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2015, (11): 117304
-117304
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DOI: 10.1088/1674-1056/24/11/117304