Fluid simulation of inductively coupled Ar/O 2 plasmas: Comparisons with experiment
王艳会, 刘巍, 张钰如, 王友年
Fluid simulation of inductively coupled Ar/O 2 plasmas: Comparisons with experiment
Wang Yan-Hui (王艳会), Liu Wei (刘巍), Zhang Yu-Ru (张钰如), Wang You-Nian (王友年)
中国物理B . 2015, (9): 95203 -095203 .  DOI: 10.1088/1674-1056/24/9/095203