Strain analysis of free-standing strained silicon-on-insulator nanomembrane
孙高迪, 董林玺, 薛忠营, 陈达, 郭庆磊, 母志强
Strain analysis of free-standing strained silicon-on-insulator nanomembrane
Sun Gao-Di (孙高迪), Dong Lin-Xi (董林玺), Xue Zhong-Ying (薛忠营), Chen Da (陈达), Guo Qing-Lei (郭庆磊), Mu Zhi-Qiang (母志强)
Chin. Phys. B
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2015, (3): 36801
-036801
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DOI: 10.1088/1674-1056/24/3/036801