Influence of substrate bias voltage on the microstructure of nc-SiO
x:H film
李慧敏, 于威, 徐艳梅, 季云, 蒋昭毅, 王新占, 李晓苇, 傅广生
Influence of substrate bias voltage on the microstructure of nc-SiO
x:H film
Li Hui-Min (李慧敏), Yu Wei (于威), Xu Yan-Mei (徐艳梅), Ji Yun (季云), Jiang Zhao-Yi (蒋昭毅), Wang Xin-Zhan (王新占), Li Xiao-Wei (李晓苇), Fu Guang-Sheng (傅广生)
Chin. Phys. B
.
2015, (2): 28102
-028102
.
DOI: 10.1088/1674-1056/24/2/028102