Improved performance of AlGaN/GaN HEMT by N
2O plasma pre-treatment
宓珉瀚, 张凯, 赵胜雷, 王冲, 张进成, 马晓华, 郝跃
Improved performance of AlGaN/GaN HEMT by N
2O plasma pre-treatment
Mi Min-Han (宓珉瀚), Zhang Kai (张凯), Zhao Sheng-Lei (赵胜雷), Wang Chong (王冲), Zhang Jin-Cheng (张进成), Ma Xiao-Hua (马晓华), Hao Yue (郝跃)
Chin. Phys. B
.
2015, (2): 27303
-027303
.
DOI: 10.1088/1674-1056/24/2/027303