Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation
沈泽南, 夏洋, 刘邦武, 刘金虎, 李超波, 李勇滔
Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation
Shen Ze-Nan (沈泽南), Xia Yang (夏洋), Liu Bang-Wu (刘邦武), Liu Jin-Hu (刘金虎), Li Chao-Bo (李超波), Li Yong-Tao (李勇滔)
中国物理B
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2014, (11): 118801
-118801
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DOI: 10.1088/1674-1056/23/11/118801