Impact of nitrogen plasma passivation on the interface of germanium MOS capacitor
云全新, 黎明, 安霞, 林猛, 刘朋强, 李志强, 张冰馨, 夏宇轩, 张浩, 张兴, 黄如, 王阳元
Impact of nitrogen plasma passivation on the interface of germanium MOS capacitor
Yun Quan-Xin (云全新), Li Ming (黎明), An Xia (安霞), Lin Meng (林猛), Liu Peng-Qiang (刘朋强), Li Zhi-Qiang (李志强), Zhang Bing-Xin (张冰馨), Xia Yu-Xuan (夏宇轩), Zhang Hao (张浩), Zhang Xing (张兴), Huang Ru (黄如), Wang Yang-Yuan (王阳元)
中国物理B
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2014, (11): 118504
-118504
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DOI: 10.1088/1674-1056/23/11/118504