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Influence of roughness on the detection of mechanical characteristics of low-
k
film by the surface acoustic waves
肖夏, 陶冶, 孙远
Influence of roughness on the detection of mechanical characteristics of low-
k
film by the surface acoustic waves
Xiao Xia (肖夏), Tao Ye (陶冶), Sun Yuan (孙远)
Chin. Phys. B . 2014, (
10
): 106803 -106803 . DOI: 10.1088/1674-1056/23/10/106803