Fabrication and measurement of traceable pitch standard with a big area at trans-scale
邓晓, 李同保, 雷李华, 马艳, 马蕊, 翁浚婧, 李源
Fabrication and measurement of traceable pitch standard with a big area at trans-scale
Deng Xiao (邓晓), Li Tong-Bao (李同保), Lei Li-Hua (雷李华), Ma Yan (马艳), Ma Rui (马蕊), Weng Jun-Jing (翁浚婧), Li Yuan (李源)
中国物理B
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2014, (9): 90601
-090601
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DOI: 10.1088/1674-1056/23/9/090601