Characterization of tetragonal distortion in a thick Al <sub>0.2</sub>Ga <sub>0.8</sub>N epilayer with an AlN interlayer by Rutherford backscattering/channeling

王欢, 姚淑德

Characterization of tetragonal distortion in a thick Al _0.2Ga _0.8N epilayer with an AlN interlayer by Rutherford backscattering/channeling

Wang Huan (王欢), Yao Shu-De (姚淑德)

Chin. Phys. B . 2014, (9): 96801 -096801 . DOI: 10.1088/1674-1056/23/9/096801