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Structural properties of a-SiO
x
:H films studied by an improved infrared-transmission analysis method
王烁, 张晓丹, 熊绍珍, 赵颖
Structural properties of a-SiO
x
:H films studied by an improved infrared-transmission analysis method
Wang Shuo (王烁), Zhang Xiao-Dan (张晓丹), Xiong Shao-Zhen (熊绍珍), Zhao Ying (赵颖)
Chin. Phys. B . 2014, (
9
): 98801 -098801 . DOI: 10.1088/1674-1056/23/9/098801