Chemical mechanical planarization of Ge
2Sb
2Te
5 using IC1010 and Politex reg pads in acidic slurry
何敖东, 刘波, 宋志棠, 王良咏, 刘卫丽, 冯高明, 封松林
Chemical mechanical planarization of Ge
2Sb
2Te
5 using IC1010 and Politex reg pads in acidic slurry
He Ao-Dong (何敖东), Liu Bo (刘波), Song Zhi-Tang (宋志棠), Wang Liang-Yong (王良咏), Liu Wei-Li (刘卫丽), Feng Gao-Ming (冯高明), Feng Song-Lin (封松林)
中国物理B
.
2014, (8): 88502
-088502
.
DOI: 10.1088/1674-1056/23/8/088502