Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical vapor deposition
王维颖, 金鹏, 刘贵鹏, 李维, 刘斌, 刘兴昉, 王占国
Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical vapor deposition
Wang Wei-Ying (王维颖), Jin Peng (金鹏), Liu Gui-Peng (刘贵鹏), Li Wei (李维), Liu Bin (刘斌), Liu Xing-Fang (刘兴昉), Wang Zhan-Guo (王占国)
中国物理B
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2014, (8): 87810
-087810
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DOI: 10.1088/1674-1056/23/8/087810